Sputtering Targets

Our high-purity, low-spit targets can resolve your concerns for uniformity, reproducibility and homogeneity. We manufacture sputtering targets in a wide range of materials, sizes, forms and configurations.

Materion Delivers

Materials engineering support to devise optimal alloys compositions
Customized precious metal sputter target designs & forms that extend target life, reduce costs and increase tool uptime
High-purity source material that offers superior surface cleanliness, precise alloy composition and consistent phase content
Technologies that produce fine-grained targets that deliver uniform thin film coatings
Services that help customers manage and reclaim precious metals for optimal returns

Making advanced materials that improve the world.

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Available Materials

Precious metal & non-precious metal sputtering targets, including:
- NEW! Tantalum & Tantalum alloys
- Gold & Gold alloys
- Platinum & Platinum alloys
- Silver & Silver alloys
- Titanium & Titanium alloys
- Nickel & Nickel alloys
Standard, custom and exotic alloys
Non-traditional materials
Ceramic and sputtering targets with customized chemistries

Available Forms

Large area targets
Rotary or planar
Cast targets
Multiple shapes & sizes
Extended life designs
Ion Beam Deposition (IBD) targets

Expanded Products and Technologies

Through the acquiring of the Heraeus Target Business, we now offer the following:

Architectural & Automotive Glass – Gold, Nickel, NiCr, NiV, Palladium, Ruthenium, Silicon, Silver, Tin, TiO, Zinc
Solar -Aluminum, Al₂O₃, Copper, CuInGaSe, CuGa, Gold, Indium, NiV, Transparent Conducting Oxides – Cd₂SnO₄, TiO₂, Silicon, Silicon Alloys, Silver, ZAO, Zinc Alloys, ZnO, ZnTe
Display – Aluminum, Copper, Chromium, LiF, Molybdenum, Silicon, Silver
Data Storage – Aluminum, Cobalt, Gold, Iridium, Iron, Nickel, Palladium, Platinum, Rhodium, Silver, Tantalum, Titanium, Tungsten
Semiconductor – Gold, AuSn, AuGe, Nickel, NiPt, Palladium, Platinum, Silver, Titanium, Tungsten, WTi

Large Area Targets

For large-area coverage in coating processes, we manufacture high-performance large geometry planar and rotatable sputtering targets custom designed to meet your requirements.

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Rotatable Targets

Compared to our planar configurations, our cylindrical sputtering targets offer greater erosion zones for large-area coating operations.

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The right backing plate is critical to your sputtering process. We can assist you in selecting the best backing plate for your application. Considerations include the material properties of the target and plate and their expected operating temperatures.

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