Backing Plates

The right backing plate is critical to your sputtering process. We can assist you in selecting the best backing plate for your application. Considerations include the material properties of the target and plate and their expected operating temperatures.

Materion Delivers

Backing plates may be purchased singly or with sputtering targets or other services
Our sputtering target bonding adheres sputtering targets to backing plates with 100% alignment and proper fit
Ultrasonic testing certifies bond integrity
The combination of our material and service offerings provide you with the lowest total cost of ownership for your sputtering process
Other services available include precision parts cleaning and precious metal refining

Making advanced materials that improve the world.

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Available Materials

Typical backing plate materials include:

Copper
Aluminum
Molybdenum
Stainless Steel
Specialty Rare & Non-ferrous Metals

Full OEM Support

A partial list of equipment platforms we routinely manufacture for includes:

Anelva	Applied Material	Aviza	CVC
Evatec	KDF	Leybold	NEXX
Novellus	Perki-Elmer	SFI	Singulus
Temescal	Trikon	Unaxis	Varian
Veeco	Tango Systems

Sputtering Targets

We manufacture high-purity, low-spitting sputtering targets in a wide range of materials, sizes, forms and configurations.

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Large Area Targets

For large-area coverage in coating processes, we manufacture high-performance large-geometry planar and rotatable sputtering targets custom designed to meet your requirements.

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Rotatable Targets

Compared to our planar configurations, our cylindrical sputtering targets offer greater erosion zones for large area coating operations.

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